Chip-level1/2/3-axis MEMS Accelerometer
Descriptions of Chip-level1/2/3-axis MEMS Accelerometer:
Inertial measurement: inertial guidance, overload measurement, integrated navigation.
Tilt measurement: antenna attitude, platform measurement, tilt angle test.
Vibration measurement: mechanical equipment, bridges and dams, safety tests.
Features:
Large range, ultra-high precision, high reliability and low power consumption
Class II Non-linearity: <l0µg/g2
Bias Stability (ls smooth) (lσ): <l5ug
Bias Stability (l0s smooth): <5ug
Bias instability (Allan Curve): <2ug
Specifications:
| Product Name | Model No. | Range |
Bias (roomtemp) |
Bias instability (Allan Curve) |
Repeatability 1σ | Scale Factor |
| Single-axis MEMS accelerometer | ER-MA-6 | 60g | ± 1mg | <2ug | <10ug | 20000000 lsb/g |
| Dual-axis MEMS accelerometer | ER-2MA-5 | 30g | ± 1mg | <10ug | <30ug | 250000± 250 lsb/g |
| Three-axis MEMS accelerometer | ER-3MA-09 | 40g | ± 1mg |
20ug(X ,Y) 25ug(Z) |
<50ug(X,Y), <75ug(Z) |
12800± 13 lsb/g |
